Research on Wireless Power Transmission of Attitude Detection System of MEMS Sensor for Spherical Motor

This study proposes an innovative wireless power transfer (WPT) system, specifically designed to charge inertial measurement sensors embedded in microelectro-mechanical systems (MEMSs). By combining a spherical motor with MEMS sensors, this system significantly enhances attitude detection and measurement accuracy. Its standout feature is the use of a design incorporating ring and multiple coils, allowing power transmission from different angles without limiting the motor’s range of motion. This design overcomes the limitations of traditional planar WPT systems that provide unidirectional power transmission, ensuring continuous power supply to MEMS even after prolonged use. This article presents an innovative fast coil mutual inductance calculation model that accurately detects changes in mutual inductance during motor rotation and proposes a strategy to mitigate cross-coupling effects to improve transmission efficiency. To verify the system’s performance, an experimental setup is developed, and the control experiments conducted showed significant improvement in measurement accuracy after integrating the WPT system.