Temperature Dependence of Conductivity Properties of Epitaxial Beta-Gallium Oxide Evaluated in Terahertz Region

Terahertz time-domain spectroscopy (THz-TDS) was utilized in this study to analyze the transmittance spectrum of a homoepitaxial beta-gallium oxide (β-Ga2O3) sample oriented along the [100] axis across a temperature range from 90 K to 400 K. The refractive index of the epilayer was determined within the frequency range of 0.2-3 THz. Employing the Drude-Lorentz model, we conducted a comprehensive analysis of the temperature-dependent conductivity properties of epitaxial β-Ga2O3. Our findings offer valuable insights into the thermal behavior of β-Ga2O3, thereby enriching our comprehension of its potential applications.