Design of a Si Carrier-Depletion-Type Mach-Zehnder Modulator With Ultra-Compact Photonic Crystal Slow-Light Phase Shifter

A Si Mach-Zehnder modulator using an ultra-compact photonic crystal slow-light phase shifter of 22 $\mu \mathrm{m}$ is numerically studied. The modulator exhibits an ultra-small $V\pi L$ of $4.76\times 10^{-2}\mathrm{V}\cdot \text{cm}$ and clearly opened-eye at 15 Gbit/s.