Precision Atmospheric Pressure Driven Actuator controlled by Self-Sensing Electro-Magnetic Valve

This paper presents an innovative Atmospheric Pressure Driven Actuator (APDA) that achieves precise control by utilizing a Self-Sensing Electro-Magnetic Valve (SEMV). SEMV detects the magnitude of the magnetic field change through the magnetoelectric effect of the magnetostrictive/piezoelectric composite material, which results in the corresponding valve opening. The actuator operates via fluid transmission and requires offline charging. A constant and stable energy supply is available throughout the actuation process, resulting in quasi-static characteristics. Precise trajectory tracking can be achieved by local closed-loop control of the control element SEMV merely. According to Pascal's principle, the diameter of the APDA is adjusted to change the transmission ratio, which can be adapted to a variety of working environments with different load and precision requirements. To ensure precise flow control and efficient fluid transmission, system dynamics were modeled to complete the prototype design. In addition, Simulation results show that nanometer displacement resolution and submicron trajectory tracking accuracy are obtained under global open-loop conditions. This technology enables high-precision with infinitely expandable travel ranges, and is particularly suitable for applications with high stability requirements.