Canting in double-layer perpendicular recording media prepared by in-line DC magnetron sputtering

Angle-of-incidence effects result in canting of the Angle-of-incidence effects result in canting of the (111) planes of Permalloy films and the (0002) planes of CoCr films prepared by in-line DC magnetron sputtering, X-ray depth profiling has shown how the cant angle and Δθ_5O vary with depth in the films. The dependence of coercivity the angle of the applied field relative to the direction of substrate motion during sputtering (MD) revealed t h a t the easy axis of CoCr films is canted away from the film normal and towards the MD.