Modeling Reluctance Actuator Topologies with a Focus on Stiffness

The reluctance actuator (RA) can provide more acceleration than the Lorentz actuators that are currently in use in next-generation wafer scanners used in semiconductor lithography systems. These wafer scanners are utilized in semiconductor lithography systems. Due to the significant amount of nonlinearity that exists between the RA's input current and output force, it might be challenging to build an effective control system. In the ten years prior, a great number of studies contributed to the modelling, design, and control of RAs; however, the geometrical topology of the actuator was not evaluated from the standpoint of control. This study presents topology selection criteria with the intention of improving the control design process. Additionally, it assesses the various accessible RA topologies, including C and E cores, with reference to the modelling of stiffness. The C-core RA was shown to have a lower magnitude of stiffness at low air gap values (less than 0.5 mm) when compared to the E-core RA. This was discovered through simulation as well as through experimentation.