Opto-Mechanical Strain Coupling Effect in n-3C-SiC/n-Si Heterojunction: Toward Mechanical Sensing and Light Harvesting Applications

Mechanical sensors with photoenergy harvesting capability are beneficial for the development of environmental monitoring sensor network in remote area. This research paper investigates the opto-mechanical strain coupling effect in n-type-3C-SiC/n-type-Si heterojunction for mechanical strain sensing and light harvesting application. The effect is demonstrated through a strain sensing structure capable of harvesting photoenergy. The prototype sample has demonstrated the photoenergy harvesting ability, generating up to 97mV when exposed to red laser (wavelength 637nm) at a power of 600 μW. Simultaneously, the device is capable of sensing mechanical strain (ε) with maximum fractional changes of output voltage value (ΔV/V) of 13.11× ε for strain value ranging from 0 to 500×10
^-6
. This is five times higher than conventional metal strain gauges, which have a typical value of approximately 2. This work contributes to the understanding of SiC/Si heterojunction, paving the way for developing multifunctional mechanical sensors capable of harvesting photoenergy.