Expanding Design Technology Co-Optimization Potentials with Back-Side Interconnect Innovation

This report analyzes the benefits obtained through Back-Side Interconnect (BSI) technology, encompassing Back-Side Power Delivery Network (BSPDN) and Back-Side Signal (BSS), from the perspective of Design-Technology Co-Optimization (DTCO). Through BSPDN, benefits such as metal pitch relaxation and/or cell height reduction can be achieved. Additionally, the implementation of BSS technology allows for intra-cell and inter-cell routing on the back side, leading to improved speed and greater reduction in cell area.