Effect of Parylene Coating on the Performance of Implantable Pressure Sensor

Parylene is widely used in the field of biomedical engineering due to its strong barrier properties against water and ions, as well as its superior biocompatibility. In this study, we have developed a pressure sensor module specifically for electronic capsules, where parylene is employed as the sealing material. The pressure sensors were packaged using parylene C and parylene N films with thicknesses of 15, 30, 45, 60, and $75~\mu $ m. The effect of parylene coating thickness on the performance of pressure sensors was investigated quantitatively by experiments. Various performance indicators, such as sensitivity, linearity, root mean square error (RMSE), repeatability, and dynamic response of the pressure sensors packaged with different parylene thicknesses, have been thoroughly tested and analyzed. This research bears significance in informing the design of implantable pressure sensors.