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Thin-Film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands | IEEE Conference Publication | IEEE Xplore

Thin-Film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands


Abstract:

In this work, we investigate the frequency scaling of shear-horizontal (S.H.) surface acoustic wave (SAW) resonators based on a lithium niobate on insulator (LNOI) substr...Show More

Abstract:

In this work, we investigate the frequency scaling of shear-horizontal (S.H.) surface acoustic wave (SAW) resonators based on a lithium niobate on insulator (LNOI) substrate into the centimeter bands for 6G wireless systems. Prototyped resonators with wavelengths ranging between 240 nm and 400 nm were fabricated, and the experimental results exhibit a successful frequency scaling between 9.05 and 13.37 GHz. However, a noticeable performance degradation can be observed as the resonance frequency (\boldsymbol{f_{s}}) scales. Such an effect is expected to be caused by non-ideal \mathbf{h}_{\mathbf{elec}}/\boldsymbol{\lambda} for smaller \boldsymbol{\lambda} devices. The optimized LNOI SH-SAW with a \boldsymbol{\lambda} of 400 nm exhibits a \boldsymbol{f_{s}} of 9.05 GHz, a \boldsymbol{k}_{\mathbf{eff}}^{\mathbf{2}} of 15%, \boldsymbol{Q}_{\mathbf{max}} of 213 and a FoM of 32, which indicates a successful implementation for device targeting centimeter bands.
Date of Conference: 13-15 May 2024
Date Added to IEEE Xplore: 29 May 2024
ISBN Information:
Conference Location: Chengdu, China

References

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