A high performance 1 Mbit EPROM

A high-performance 1-Mb EPROM has been developed by utilizing advanced 1.2-/spl mu/m minimum design rule technology. The device technology used is n-channel E/D MOS. The memory cell size is 5.5/spl times/7.5 /spl mu/m and the die size is 9.4/spl times/7.2 mm. The word organization is changeable between 64K words/spl times/16 bits and 128K words/spl times/8 bits. The active power dissipation is 500 mW and the standby power dissipation is 150 mW. The access time is typically 200 ns. The programming voltage is 12-14 V and the programming pulse width is typically 1 ms/word. In order to realize such a high-density, high-speed, low power 1-Mb EPROM, 1.2-/spl mu/m minimum patterning process technology, a high-speed sense amplifier, and a high-speed decoder are used.