Microfabrication of Prototypes of Millimeter-Band Electromagnetic Components by Using DLP 3D Printing and Magnetron Sputtering

Nowadays, additive manufacturing appears to be very promising for rapid, straightforward, and cost-effective fabrication of various novel circuits and components for millimeter- and THz-band electron devices. This paper presents the results of microfabrication of millimeter-band components by digital light processing (DLP) 3-D printing and magnetron sputtering. The cold-test electromagnetic measurements show good transmission and reflection properties of the fabricated structures.