Monolithic Integrated Interface ASIC With Quadrature Error Correction for MEMS Dual-Mass Vibration Gyroscope

A novel design method of a monolithic integrated interface circuit with quadrature error correction for a microelectromechanical system (MEMS) dual-mass vibratory gyroscope is proposed in this article. The source and effect of quadrature error of the MEMS gyroscope are analyzed. The gyroscope system-level model is established, the gyroscope system with quadrature error correction is simulated by the system-level model, and the quadrature loop system stability and bandwidth are analyzed. The interface application-specific integrated circuit (ASIC) chip with quadrature error correction has an area of
$4.3\times4.3$
mm and a power consumption of 90 mW. After adding the coupling stiffness correction circuit, the scale factor of the gyroscope is changed from 43 to 40 mV/°/s, the nonlinearity is reduced from 1326.7 to 150.6 ppm, the angular random walk (ARW) is reduced from 0.25 to 0.028°/
$\surd \text{h}$
, and the bias instability (BI) is reduced from 3.25 to 0.29°/h. Through comparison tests, the integrated interface ASIC chip with quadrature correction function has a better performance. This monolithic integrated interface circuit can provide a highly integrated circuit design solution for the MEMS vibration gyroscope’s broad application.