First Characterization of Comb Drive BasedMicro Mirror Arrays

The demand for more advanced display technologies for virtual- and augmented reality requires new spatial light modulators (SLMs) to fulfil the requirements for fast and accurate phase modulation. Simulations of the developed comb drive design have shown its ability to meet these requirements. The first manufactured devices now proof that the approach of ultra-high-density integration of several million pixels, each only a few micrometer in size, can lead to the desired goal: a micro mirror array (MMA) based SLM that enables real time holographic imaging.