Design of RF MEMS Switch free from unavoidable microwelding with low actuation voltage

This paper gives a study based practical overview of Electrostatically actuated Radio Frequency MicroElectroMechanical-Systems (RF MEMS) Capacitive shunt switches. Switch configurations and their working principles in meeting the evolving demands of 5G technology are discussed. The study extensively reviews RF-MEMS switches, emphasizing their RF performance, actuation voltage, reliability, switching time to facilitate the seamless integration of RF-MEMS switches into 5G applications. The findings offer a comprehensive summary intended to serve as a valuable reference for future research endeavors aimed at optimizing the design and performance of RF-MEMS switches, particularly within the context of 5G and other high-performance applications.