New Profirometer and Data Stitching Algorithm for Large Mirror Measurement

Dragging three-probe method as metrology and data stitching algorithm for fabrication of large mirror are presented. The method is applicable to large free form mirrors and is very robust against the environment, space saving, in addition to that it can be installed to polishing machine. The stitching algorithm can integrate smoothly multiple data set without inconsistency among the data sets as well as improves the measurement accuracy and extends the measurable area of the metrology system. We demonstrate performance of the method with showing results of fabrication process of 1 meter size flat, convex aspheric, and 2-m off-axis parabolic mirrors.