Shock Protection for Capacitive Micro-vibration Sensors

Micro-vibration sensors play a crucial role in enhancing the performance of high-precision payloads within the aerospace industry. However, significant impacts occur during spacecraft launch and orbit insertion, posing an elevated risk of failure for the delicate components of micro-vibration sensors due to their heightened sensitivity. This study proposes a protection strategy for MEMS capacitive micro-vibration sensors, which involves the installation of limit blocks on both sides of the mass block to safeguard sensitive components, and the application of organic silicone potting adhesive for the sensor chip. Through dynamic testing, it has been ascertained that the sensor's signal remains within its designated range, effectively clipping any signals that exceed this range. Additionally, extensive impact testing has demonstrated that the sensor remains undamaged and its measurement performance remains unaltered compared to pre-test conditions.