Design and Characteristics of a Two-Axis Piezoelectric Accelerometer With Right Angle Cantilever Beam

An increasing number of individuals are delving into the research of high-precision multi-axis vibration sensors. Traditional multi-axis piezoelectric accelerometers are constructed by orthogonally combining multiple single-axis piezoelectric accelerometers, ensuring no signal coupling among them. However, these kind accelerometers typically exhibit large volume and mass, failing to meet the requirements for miniaturization. In this paper, a two-axis piezoelectric accelerometer is proposed based on the stress-averaged right-angled beam structure. The paper commences with a finite element analysis of the stress distribution within the right-angled beam structure. This analysis confirms that the right-angled cantilever beam effectively smooth stresses on the piezoelectric element, leading to a substantial improvement in the element's service life. Secondly, the paper realizes a double-auxiliary-beam two-axis piezoelectric accelerometer structure. Through finite element simulation, the structure is observed to exhibit favorable frequency response characteristics and low inter-axis coupling, thereby confirming its structural feasibility. The findings in this paper offer valuable ideas for the multidimensional measurement of subsequent sensors.