ARROW-based optical accelerometers

Design, fabrication and characterization of silicon-based stress-free self-aligned quad beam accelerometer is presented. Standard total internal reflection waveguides have been replaced by ARROW structures, enhancing the sensitivity to >4dB/g at the wavelength visible range (633nm) Moreover, as the waveguide core has approximately the same size as the input fiber optic, insertion losses have been reduced to 2.5dB. Attenuation in ARROW waveguides is 0.3dB/cm.