Nanostructured TiO/sub 2/ thin films prepared by supersonic beams and their application in a sensor array for the discrimination of VOC

In this paper, we present the first sensor ever built using films grown by supersonic beam of cluster oxides as sensing material. Supersonic cluster beams, produced by a pulsed micro-plasma cluster source have successfully used to prepare nanocrystalline thin films of TiO/sub 2/. The sensors, prepared by using different deposition parameters, were suitable for use in a gas sensor array for electronic nose. Sensors showed a quite good response to ethanol, methanol and propanol. Principal component analysis was used as method for testing the array capability in discrimination and recognition of the volatile compounds.