Simulation and design of the silicon drag-force-gas flowsensor based on piezoresistive effect

A silicon drag-force-gas flowsensor based on piezoresistive effect has been developed for IC technology applications. The sensor has been tested at gas flow from 20 to 500 l/h with temperature varying from 18-100/spl deg/C. The experimental pattern of a silicon gas flowsensor was designed, fabricated and tested. The theoretical analysis and simulation of a flowsensor chip in an airflow was carried out for the investigation of flowsensor behavior and characteristics. The finite element method (FEM) of ANSYS-software has been employed for the complete numerical analysis of this structure.