The investigation of an integrated gas sensor array

A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO/sub 2/ film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO/sub 2/ film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can differentiate CO, NO/sub 2/ and H/sub 2/S and measure the concentration of each gas without the analysis of artificial neural network.