Silicon Nitride High Confinement Thermally- and E/O Tuned Photonic Integrated Platfrom

In this work we present developed silicon nitride high confinement thermally- and E/O tuned platform, that shows propagation losses lower than 0.05 dB/cm for 1550 nm wavelength and lower than 0.30 dB/cm for 935 nm wavelength. This results are achieved by material properties optimization and scattering on roughness and stitching errors minimization. We also show here nanophotonic devices fabricated basing on developed technology, automatic fiber coupling and wire bonding.