Optimization and Experimentation of a 3-axis Piezoelectric Accelerometer with Cylindrical Proof Mass

This work reports the simulation and fabrication of a piezoelectric acceleration sensor on a macroscopic scale. An accelerometer is an electronic device that measures proper acceleration. The studied sensor structure consists of a cylindrical rod proof mass fixed in the center of a cylindrical disc for the generation of stresses, and then a thin circular piezoelectric layer is placed on top to convert the mechanical stresses into electrical potential. Finite element method (FEM)-based simulations are used to optimize the structure dimensions and determine its sensitivity. The results showed a sensitivity of 1.7 V/g and 0.45 V/g along the x-/y-axis and z-axis, respectively. A practical implementation of the accelerometer was carried out, and the measurement results showed that the sensor has a sensitivity of 1.612 V/g along the x-/y-axis and 0.933 V/g along the z-axis.