Sealing Design of Piezoelectric Jetting Dispenser and Its Influence on Jetting Performance

In order to improve the sealing performance of piezoelectric jetting dispenser used in microelectronic packaging, a new jetting dispenser with arc-shaped contact structure is proposed. First, the dynamic simulation model of the dispenser is established based on Adams. Then, the influence law of contact structure and axial force on sealing performance has been discussed. The parameters of the arc-shaped contact structure have also been optimized. Finally, the experimental platform has been established. The experimental results agree with the simulation ones, which prove the established mechanism and simulation models are reliable. The experimental and simulation results show that the sealing performance and dynamic performance are improved obviously. Experiments confirm that the proposed structure and method are feasible.