High-speed high-power traveling wave distributed p-i-n photodetectors with monolithic parallel feed

Summary form only given. We have successfully fabricated a parallel feed traveling wave p-i-n photodetector with a monolithically integrated 1 X 4 MMI power splitter. The 52.2 mA of linear DC photocurrent is the highest reported for detectors operating at 1.55 /spl mu/m. The optical heterodyne output of the detector is linear up to 9 dBm of 10 GHz RF power.