Enhanced Output Voltages of Tribolectric Nanogenerator Devices by Modification of Dielectric Material with Micro-pits

A triboelectric nanogenerator (TENG) has been emerged as a self-powered source that converts mechanical energy to electrical energy. Typically, surface modifications of dielectric materials with post micro/nanostructures have improved TENG output performance by increasing the surface contact areas. Herein, we propose the embedded micro-pits in dielectric material produced by proton beam writing at Shibaura Institute of Technology for TENG devices. Experimental results show the enhancement of output voltages in vertical contact-separation mode of the embedded micro-pit TENG devices compared to the normal TENG device without the micro-pits. We also introduce the analytical model for the TENG output voltages by modifying the dielectric film with micro-pits.