Applications of intelligent control in improving dynamics of precision motion systems used in microelectronics manufacturing

Precision motion systems play a critical role in microelectronics manufacturing by accommodating different high precision and high speed requirements in all the fabrication, inspection, assembly, and handling processes. As the precision motion systems are subjected to greater acceleration, they become more sensitive to their high-frequency resonance, which is not a concern in low speed applications. Therefore better system dynamics are necessary for successful precision motion system design. A review is presented for intelligent control techniques applied to improve the dynamics of precision motion systems and their potential extension into microelectronics manufacturing. Based on the review, utilization of intelligent control technologies is proposed to suppress adverse system dynamic behaviors while requirements on system stiffness and tolerance can be significantly relaxed. This proposed strategy appears especially meaningful and attractive, given the reality that the control electronics of precision motion systems keeps getting more capability and less expensive and the control algorithms can be optimized and tested very quickly with little cost.