Analysis of the Impact of the Central Connecting Element Stiffness on the Accuracy Characteristics of Micro-Positioning Elastic Module with “Butterfly” Flexures

Angular orientation and micro-positioning systems with elastic monolithic flexures are one of the preferred in precision mechanical engineering, especially in cases where high accuracy and minimal deviation of the axis of rotation or low to no maintenance and operation in adverse/contaminated environment are required. These advantages are related to the fact that the module is monolithic, which practically means that there are no assembled elements and there is no friction between the various components of the system. This paper presents the results of the study of the stiffness of the central element that is connecting the elastic flexures and its impact on the deviation of the center of rotation and transfer curve of the micro-positioning elastic module.