Integrated Ultra-Broadband THz Photodiode with Silicon Rod Waveguide Interface

Dielectric waveguides have shown great promise for THz integrated systems due to their ultra-low loss and broadband operation. This study reports an integration of ultra-broadband uni-traveling-carrier photodiode (UTC-PD) with high-resistivity silicon dielectric rod waveguides (DRW), which would fully exploit ultra-broadband performance of THz photomixers and play a vital role in developing practical on-chip THz spectroscopy systems.