High Spatial Resolution Thermometer Microprobe Based on the Nitrogen-Vacancy Centers Ensemble in the Diamond Particle With Tapered Fiber

High-resolution temperature measurement has a wide range of applications in biomedicine, microelectronics, and so on. Diamond particles with nitrogen-vacancy (NV) color centers can be used for high-resolution measurement of physical quantities such as temperature and magnetic field because of their long spin coherence time and wide operating temperature range. In this study, we propose a thermometer microprobe based on diamond particles with NV color centers attached to tapered fibers to sense temperature with high resolution. Due to the difference in crystal strain and surface state characteristics, the temperature dependence of the D parameter (d D/d T) in optically detected magnetic resonance (ODMR) spectra is inconsistent with different NV color center diamond samples. We investigated the influence of laser power (optimal power 13.4 mW) and microwave power (optimal power 20 dBm) on the D parameter and d D/d T(−92.1 kHz/K) to improve the accuracy of the temperature measurement. We also demonstrate temperature sensing of the cooling process and polyimide (PI) film surface using this microprobe and thermocouple (TC). The thermometer microprobe is expected to sense temperature with high spatial resolution in the fields such as integrated circuit (IC) and biology.