Pits topography measurement by atomic force microscope with carbon nano tube probe

In this study, we fabricated tiny pits with 200-nm dimension for an ultra-high-density optical ROM disk by an electron beam (EB) lithography technique, and observed the topographies of the pits by atomic force microscopy (AFM). Comparison between the images obtained with or without the carbon nanotube (CNT) probe, we clarify the CNT probe is highly effective for the observation of the minute pits, and also we describe several problems and advantages in the usage of CNT probe.