Reconfigurable microwave device based on self-rolling interdigital microactuator

A two-in-one function reconfigurable microwave passive device is designed which can be functionally reconfigured to operate either as an inductor, or a coplanar waveguide (CPW) delay line. Reconfiguration is guided by interdigital microactuators which are fabricated by self-rolled-up membrane (S-RuM) nanotechnology and controlled by sequential direct-current (DC) voltage. The simulated result shown that inductance is as large as 21 nH and Q factor is 5.4 at 1 GHz, maximum working frequency is 1.5 GHz; the delay line achieves a delay of 1450 ps and an insertion loss about 1.0 dB at 1 GHz. Suitable for multi-function microwave circuits.