Round-Trip Sensitivity-Bandwidth Optimization and Characterization of High-Frequency PMUTs

Piezoelectric micromachined ultrasonic transducers (PMUTs) are fabricated with Micro-Electro-Mechanical Systems (MEMS) processes. They have advantages such as high uniformity and density, high flexibility in array configuration, and compatibility with integrated circuits. However, PMUTs generally have bottleneck issues with round-trip sensitivity, which restrict the improvement of acoustical imaging resolution. In this work, a round-trip modeling and optimization method is proposed to better analyze the round-trip sensitivity and solve the round-trip bottleneck problem of the PMUTs. Besides, the COMSOL livelinked with MATLAB to greatly simplify the calculation complexity is used to eliminate the influence of geometric parameters on center frequency variations and sweep several radii and thickness parameters.