Novel Non-Destructive Physical Bitmap Verification Technique on SRAM and NOR Flash

In this paper, several optical fault isolation techniques (PEM, EOFM, OBIRCH) were evaluated to non-destructively verify the physical coordinate of SRAM and NOR Flash bitmap. PEM and EOFM are effective for SRAM bitmapping, while OBIRCH and PEM are effective for NOR Flash bitmapping. The physical bitmapping techniques presented provide an alternative to the conventional physical bitmap verification technique using FIB circuit edit and laser induced damage.