Surface structure and optical properties of Ti-diffused LiNbO/sub 3/ waveguides

The topmost surface of crystal during Ti-indiffused LiNbO/sub 3/ waveguide preparation was studied using atomic force microscopy and high energy electron diffraction. The formation of the flat terraces with height step /spl sim/0.24nm as a result of high temperature annealing has been detected. The global changing of surface morphology induced by Ti diffusing was observed. No new phase formation on the surface was detected.