Performance Comparison of Two MEMS Fluxgate Magnetic Field Sensors with Different Cores

Fluxgate sensor has become the best vector magnetic field sensor with outstanding comprehensive performance because of its advantages in temperature stability, accuracy, resolution, and sensitivity, as well as its simple structure and the characteristics of measuring static and low-frequency magnetic fields. The magnetic properties of the soft magnetic core seriously affect the performance of the fluxgate sensors. Currently, the fluxgate sensor based on the MEMS technology mainly adopts strip core and thin film core. How to select the core for different application scenarios is a problem that needs to be studied. Based on MEMS process, two micro-fluxgate sensors were fabricated separately using a cobalt-based amorphous strip and Fe-Ni film as core, and their performance was compared.