Precise positioning using electrostatic glass motor with diamagnetically suspended rotor

This paper presents a novel application of diamagnetic levitation. In combination with electrostatic glass actuators, levitation and synchronous propulsion of a suspended rotor become possible. The proposed compact system finds promising applications in the field of positioning of optical devices. A potent yet cost-effective diamagnetic material for the rotor along with an optimized permanent magnet pattern on the stator will be presented, allowing frictionless suspension of objects weighting several grams. The suggested rotary device allows very precise and smooth synchronous rotation over a wide speed range (1 /spl mu/m/s-10 m/s). Among the focused applications are precise scanning and the readout of holographic crystals for data storage.