Overview of Pixel Scaling Technology in CMOS Image Sensor

In recent years, the evolution of image sensor has accelerated the combination of imaging and general sensing by leveraging artificial intelligence, making image sensors key devices that support everyday life worldwide [1]. Advanced imaging and sensing technologies should also enhance the quality of life. For instance, imaging technology can elicit human emotions through beautiful images. Sensing technology is expected to find new applications, in areas such as mobility, smart factories, and smart cities. Pixel scaling technology and stacked device integration are driving the market of mobile imaging. The evolution of stack integration can enable new applications while increasing the scalability and flexibility of process technology. Additionally, breakthroughs have been achieved in practical applications of sensing technologies such as depth sensing, event-based vision sensing, and invisible light sensing. The use of image sensors is also increasing to support safe and comfortable living.