Modeling and Analysis of Novel 3-Axis MEMS Accelerometer for Biomedical Applications

Health and activity monitoring can now be done remotely using sensor networks attached to the wearer’s body. Consequently, body-wearable sensor networks provide for a customized approach to health and fitness. The spread of the wearable gadgets increases the variety of their applications. There are numerous technologies that enable the capture of movement; among them, accelerometers are the most frequently cited by researchers. In this paper, a novel micromachined MEMS tri-axis accelerometer device is proposed with two sensing principles which can simultaneously measure acceleration inputs along X, Y and Z directions is proposed. The proposed MEMS accelerometer utilizes capacitive plates and a diaphragm to sense acceleration inputs along X and Y directions and piezoresistive effect to sense acceleration along Z axis. The working principle and sensor features like range, sensitivity, frequency response of the three-axis MEMS accelerometer are analyzed. Accelerometers have been used in biomedical applications such as human motion analysis, motion detection vibration, and impact studies. COMSOL Multiphysics simulation software is used for modeling and analysis of novel MEMS accelerometer.