Simulation, Fabrication and Characterization of a Si3N4 based Three Stigmatic Point Array Waveguide Grating with Multiple Input Channels by Using Aberration Theory

The Three-Stigmatic-Point (TSP) Array Waveguide Grating (AWG) with multiple input channels are demonstrated. Across all three input channels, the measured transmission of central output channel is -2 dB; the highest resolving power reaches over 18,000 with less than 6% reduction for the outer output channels.