Research on Measurement Principle and Electrode Optimization of Non-Intrusive MEMS Voltage Sensor Based on Charge Induction

On the basis of the existing non-intrusive Micro-Electro-Mechanical System (MEMS) voltage sensor based on charge induction, the sensing mechanism of the sensor is studied and the metal sensing structure is optimized in this paper. Firstly, the measuring principle and structure of MEMS voltage sensor are analyzed. The equivalent model of non-intrusive voltage sensor is established. The transfer function and amplitude-frequency response characteristics of voltage sensor are analyzed. And set up 10kV overhead line test environment. The input and output characteristics of the sensor are tested by experiment. The effects of different shapes and sizes of metal electrodes on the output of the sensor were compared and tested. The experimental results show that the line voltage sensor has good linear output. The increase of the area of the metal electrode will lead to the increase of the output of the sensor, and the circular arc electrode can make the sensor have better output signal.