Distributed MEMS phase shifters on silicon using tapered impedance unit cells

This paper presents results for one bit distributed coplanar waveguide (CPW) MEMS phase shifters that are designed to operate from 5-40 GHz on high resistivity silicon. The periodically loaded structures use 11 MEMS capacitors interconnected with tapered impedance transmission line. The phase shift of a one bit configuration is approximately 150/spl deg//dB at 25 GHz and 211/spl deg//dB at 35 GHz. The return loss in the up and down state is greater than 10 dB from 10-35 GHz.