Spiral inductor performance in deep-submicron bulk-CMOS with copper interconnects

This paper reviews design considerations for spiral inductors in bulk CMOS and reports investigations carried out in a commercial 0.18 /spl mu/m process using 6-layer copper metalization. Quality factors of approximately 8 are measured for 10 nH spirals operating between 1 and 2 GHz. Comparisons of Q and self-resonant frequency are provided for a variety of construction variables including with/without a patterned ground shield, metal-6 only versus stacking layers 3 thru 6, dense versus sparse vias, wide versus narrow traces, and with/without metal-fill.