A novel pressure balanced microfluidic valve

A microfluidic valve capable of driving fluids under high (up to 10 atm) pressure is presented. The valve actuation is based on a principle of pressure compensation by means of an air chamber that supports a moving membrane. The air balances the fluid pressure, and then an electrostatic actuator can open the valve. This valve is designed with valve arrays in mind. In such configurations, it is useful for analysis, biology and medicine applications.