Design and Analysis of Pressure Sensor based on Micro Hole Photonic Crystal Slab

This study presents a novel photonic crystal (PC) pressure sensor design and three-dimensional (3D) modeling and simulation for three different structures. A 2D PC slab based on silicon is used to implement the device on a SiO2 substrate. Using Ansys Workbench and the Rsoft Optical tool, strain/stress simulations, as well as spectrum simulations, are carried out. In this study, the deformation of various structures, including rectangular, circular, and square diaphragms, as well as variations in refractive index are taken into account when calculating the sensitivity of the suggested pressure sensor. The numerical findings demonstrate that when pressure is applied, the refractive index fluctuations increase the transmission spectrum's resonant wavelength while the deformation factor decreases it. It has been demonstrated that there is a linear relationship between the applied pressure and the intended micro-resonant cavity's wavelength. The square diaphragm has shown maximum sensitivity compared to other structures. For the minimum detectable applied pressure of 0.5 Pa, the simulation result shows that for the three types of datagrams rectangle, square, and circular it is found that there is a distinct shift in wavelength. For the circular diaphragm's shift in wavelength is 742 μm, whereas the rectangle and square observed shift in wavelength is 956 μm and 1016 μm respectively. This can be applied in biomedical applications. The proposed sensor system has shown feasibility for future fabrication.