Performance Analysis of Micro-Electro-Mechanical Systems Based Capacitive Accelerometer

This article compares MEMS capacitive accelerometer springs. This study designs MEMS single-axis accelerometers with alternative suspension systems. Structure analysis for 2 kHz resonance. Comparing these devices shows that certain criteria must be compromised to satisfy requirements. Higher displacement sensitivity reduces mechanical stability, and vice versa. COMSOL Multiphysics runs the simulations.