Design of 3D SAW Filters Based on the Spectral Element Method

Surface acoustic wave (SAW) devices are key components in 5G communication systems, and the design of SAW filters with high frequency, high performance and high reliability is a necessary and challenging task. In this work, SAW resonators with
$LiNbO_{3}/SiO_{2}/Si$
multi-layer structure are designed based on the spectral element method (SEM). Normally, however, massive computing resources are needed for solving a whole resonator directly by using full-wave numerical methods. To avoid simulating the large-aperture full structure of any SAW resonator, an equivalent small-aperture 3D structure can be modelled in the direction of the aperture by changing the internal resistance of the driving source to obtain the results of the full-scale aperture model. The one-port SAW resonators are then connected in the form of ladder networks to form band-pass SAW filters. The numerical results show that the SEM is more computationally efficient than the finite element method under the same number of degrees of freedom, and the results of the 3D small-aperture model are consistent with the complete resonator.