A Sensitivity-Enhanced Fiber Optic Fabry-Perot Acoustic Sensor Based on Grooved Diaphragm

A novel fiber optic Fabry-Perot acoustic sensor based on a grooved diaphragm has been proposed, avoiding the decrease of resonant frequency due to the enhanced sensitivity of the sensor based on conventional circular diaphragm. The effect of the structural parameters on sensitivity and resonant frequency is investigated by finite element simulation, and the designed diaphragm is fabricated by a digital light processing 3D printer. Experimental results indicate that the sensor based on the grooved diaphragm has an acoustic pressure sensitivity of 37.44 mV/Pa @2 kHz and a resonant frequency of 2.12 kHz, where the sensitivity is about 2.07 times that of the sensor based on the conventional circular diaphragm and the resonant frequency is almost unchanged. It is shown that the proposed sensor has the advantages of simple fabrication process, high consistency, and excellent applicability for weak acoustic signal detection.