Performance of integrated inductors with CoTaZr and CoNbZr magnetic materials

Summary form only given. The biggest challenge facing integration of magnetic material onto silicon is the compatibility of magnetics with standard silicon processing techniques. Integrated inductors were realized using ground planes of CoTaZr and CoNbZr (/spl rho/=100 /spl mu//spl Omega/cm). The magnetic properties of CoTaZr showed no change even after undergoing high temperature processing. Inductors with 1 /spl mu/m CoTaZr produced inductance values up to 60% higher than the air core inductors at frequencies to 1.4 GHz.